<図書>
Silicon integrated circuits / edited by Dawon Kahng
(Applied solid state science : advances in materials and device research ; Supplement, 2)
データ種別 | 図書 |
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出版情報 | New York : Academic Press , 1981-1985 |
大きさ | 3 v. : ill. ; 24 cm |
所蔵情報を非表示
配架場所 | 巻 次 | 請求記号 | 登録番号 | 状 態 | コメント | ISBN | 利用注記 | 予約 |
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東京西 2F一般 | pt. C | 549.7/Si4/3 | 8901211915 |
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012002960X |
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書誌詳細を表示
本文言語 | 英語 |
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内容注記 | pt. A: Physics of the MOS transistor / John R. Brews Nonvolatile memories / Yoshio Nishi and Hisakazu Iizuka The properties of silicon-on-sapphire substrates, devices, and integrated circuits / Alfred C. Ipri pt. B: Physics and chemistry of impurity diffusion and oxidation of silicon / Richard B. Fair Silicon power field controlled devices and integrated circuits / B. Jayant Baliga pt. C. Transient thermal processing of silicon / G.K. Celler and T.E. Seidel Reactive ion-beam etching and plasma deposition techniques using electron cyclotron resonance plasmas / Seitaro Matsua Physics of VLSI processing and process simulation / W. Fichtner |
一般注記 | Includes bibliographies and indexes |
著者標目 | Kahng, Dawon |
件 名 | LCSH:Metal oxide semiconductors LCSH:Semiconductors storage devices LCSH:Integrated circuits |
分 類 | LCC:TK7871.99.M44 DC19:621.381/71 |
書誌ID | 2000023395 |
ISBN | 0120029545 |
NCID | BA00942956 |