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RT Book, Whole SR Print DC OPAC T1 Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, J.W. Coburn, R.A. Gottscho, D.W. Hess T2 Materials Research Society symposium proceedings A1 Coburn, J. W., 1932- A1 Gottscho, R. A. A1 Hess, Dennis W. A1 Materials Research Society A1 Symposium on Plasma Processing YR 1986 FD c1986 SP xvii, 463 p. K1 Plasma engineering -- Congresses PB Materials Research Society PP Pittsburgh, Pa. SN 0931837340 LA English (英語) CL LCC:TA2005 CL DC19:621.044 NO Includes indexes NO 書誌ID=2000037396; NCID=BA00570669; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000037396 OL 30