検索結果をRefWorksへエクスポートします。対象は1件です。
Export
RT Book, Whole SR Print DC OPAC T1 Optical microlithography VI : 4-5 March 1987, Santa Clara, California / Harry L. Stover, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Stover, Harry L. A1 Society of Photo-optical Instrumentation Engineers YR 1987 FD c1987 SP vi, 292 p. K1 Microlithography -- Congresses K1 Integrated circuits -- Very large scale integration -- Congresses PB SPIE PP Bellingham, Wash., USA SN 0892528079 LA English (英語) CL LCC:TR940 CL DC19:621.381/74 NO Includes bibliographies and index NO 書誌ID=2000062721; NCID=BA03823068; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000062721 OL 30