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RT Book, Whole SR Print DC OPAC T1 Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles T2 Materials Research Society symposia proceedings A1 Chang, R. P. H. (Robert Pang Heng), 1941- A1 Abeles, B. A1 Symposium on Plasma Synthesis and Etching of Electronic Materials A1 Materials Research Society YR 1985 FD c1985 SP xv, 522 p. K1 Plasma engineering -- Congresses K1 Plasma etching -- Congresses K1 Electronics -- Materials -- Congresses PB Materials Research Society PP Pittsburgh, Pa. SN 0931837030 LA English (英語) CL LCC:TA2005 CL DC19:621.044 NO Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984 NO Includes bibliographies and indexes NO 書誌ID=2000038006; NCID=BA03290705; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000038006 OL 30