検索結果をRefWorksへエクスポートします。対象は1件です。
Export
RT Book, Whole SR Print DC OPAC T1 Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Stover, Harry L. A1 International Society for Hybrid Microelectronics A1 Society of Photo-optical Instrumentation Engineers YR 1985 FD c1985 VO spine : pbk. VO pbk. SP vi, 260 p. K1 Microlithography -- Congresses K1 Integrated circuits -- Very large scale integration -- Congresses PB SPIE--the International Society for Optical Engineering PP Bellingham, Wash., USA SN 0892525738 LA English (英語) CL LCC:TR940 CL DC19:621.381/74 NO Includes bibliographies NO 書誌ID=2000062008; NCID=BA2399852X; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000062008 OL 30