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RT Book, Whole SR Print DC OPAC T1 Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida / Sayan D. Mukherjee, editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Mukherjee, Sayan D. A1 Society of Photo-optical Instrumentation Engineers A1 Metallurgical Society (U.S.) YR 1987 FD c1987 VO pbk. SP x, 366 p. K1 Semiconductors -- Design and construction -- Congresses PB SPIE PP Bellingham, Wash., USA SN 089252832X LA English (英語) CL LCC:TK7871.85 CL DC19:621.3815/2 NO Includes biblographies NO 書誌ID=2000062409; NCID=BA13205280; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000062409 OL 30