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RT Book, Whole SR Print DC OPAC T1 Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Monahan, Kevin M. A1 Society of Photo-optical Instrumentation Engineers YR 1987 FD c1987 VO pbk. SP vi, 329 p. K1 Integrated circuits -- Inspection -- Congresses PB SPIE--the International Society for Optical Engineering PP Bellingham, Wash., USA SN 0892528109 LA English (英語) CL LCC:TK7874 CL DC19:621.381/73 NO Includes bibliographical references and index NO 書誌ID=2000062463; NCID=BA1312222X; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000062463 OL 30