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RT Book, Whole SR Print DC OPAC T1 Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands / Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.] T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Stover, Harry L. A1 Wittekoek, Steven A1 Association nationale de la recherche technique YR 1987 FD c1987 VO pbk. SP x, 211 p. K1 Integrated circuits -- Design and construction -- Congresses K1 Microlithography -- Congresses PB SPIE-the International Society for Optical Engineering PP Bellingham, Wash., USA SN 089252846X LA English (英語) CL LCC:TK7874 CL DC19:621.381/73 NO Includes bibliographies and index NO 書誌ID=2000062575; NCID=BA1243085X; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000062575 OL 30