検索結果をRefWorksへエクスポートします。対象は1件です。
Export
RT Book, Whole SR Print DC OPAC T1 Silicon processing : a symposium / sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor T2 ASTM special technical publication A1 Gupta, D. C. (Dinesh C.) A1 ASTM Committee F-1 on Electronics A1 United States. National Bureau of Standards A1 Stanford University A1 Symposium on Silicon Processing YR 1983 FD c1983 SP 559 p. K1 Silicon -- Congresses K1 Semiconductors -- Congresses PB ASTM PP Philadelphia, Pa. (1916 Race St., Philadelphia 19103) LA English (英語) CL LCC:TK7871.15.S55 CL DC19:621.3815/2 NO Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982 NO "ASTM publication code number (PCN) 04-804000-46." NO Includes bibliographical references and index NO 書誌ID=2000062604; NCID=BA04320787; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000062604 OL 30