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RT Book, Whole SR Print DC OPAC T1 Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, Marc Wittmer, James Stimmell, Michael Strathman T2 Materials Research Society symposia proceedings A1 Wittmer, Marc A1 Stimmell, James A1 Strathman, Michael A1 Materials Research Society A1 Symposium on "Materials Issues in Silicon Integrated Circuit Processing" YR 1986 FD c1986 SP xvii, 535 p. K1 Microelectronics -- Materials -- Congresses PB Materials Research Society PP Pittsburgh, Pa. SN 0931837375 LA English (英語) CL LCC:TK7874 CL DC19:621.381/7 NO Includes bibliographies and indexes NO 書誌ID=2000062724; NCID=BA03515168; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000062724 OL 30