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RT Book, Whole SR Print DC OPAC T1 Lasers in microlithography : 2-3 March 1987, Santa Clara, California / Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Ehrlich, Daniel J. A1 Tsao, Jeffrey Y. A1 Batchelder, John Samuel A1 Society of Photo-optical Instrumentation Engineers YR 1987 FD c1987 VO pbk. SP v, 192 p. K1 Lasers -- Industrial applications -- Congresses K1 Microlithography -- Congresses PB The Society PP Bellingham, Wash., USA SN 0892528095 LA English (英語) CL LCC:TA1673 CL DC20:621.381/531 NO Errata slip inserted NO Label on cover: Daniel J. Ehrlich, Jeffrey Y. Tsao, John Samuel Batchelder, chairs/editors NO Includes bibliographical references and index NO 書誌ID=2000062846; NCID=BA14030761; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000062846 OL 30