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RT Book, Whole SR Print DC OPAC T1 Applications of plasma processes to VLSI technology / edited by Takuo Sugano ; translated by Hyo-gun Kim OT Handōtai purazuma purosesu gijutsu A1 菅野, 卓雄(1931-) YR 1985 FD c1985 SP xiv, 394 p. K1 Semiconductors -- Etching K1 Integrated circuits -- Very large scale integration -- Design and construction K1 Plasma etching K1 Vapor-plating PB Wiley PP New York SN 0471869600 LA English (英語) CL LCC:TK7871.85 CL DC19:621.381/73 NO Translation of: Handōtai purazuma purosesu gijutsu NO "A Wiley-Interscience publication." NO Bibliography: p. 369-389 NO Includes index NO 書誌ID=2000073786; NCID=BA0724373X; LK [OPAC]https://www.lib.ntu.ac.jp/opac/opac_link/bibid/2000073786 OL 30