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検索キーワード:(件名: Microlithography Congresses)
該当件数:5件
Lasers in microlithography : 2-3 March 1987, Santa Clara, California / Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
pbk.. - Bellingham, Wash., USA : The Society , c1987. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 774)
図書
Polymers for high technology : electronics and photonics / Murrae J. Bowden, editor, S. Richard Turner, editor ; developed from a symposium sponsored by the Division of Polymeric Materials--Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California, September 7-12, 1986
Washington, DC : American Chemical Society, 1987. - (ACS symposium series ; 346)
Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands / Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.]
pbk.. - Bellingham, Wash., USA : SPIE-the International Society for Optical Engineering , c1987. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 811)
Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics
spine : pbk.,pbk.. - Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering , c1985. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 538)
Optical microlithography VI : 4-5 March 1987, Santa Clara, California / Harry L. Stover, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Bellingham, Wash., USA : SPIE , c1987. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 772)